An Experimental and Analytical Study of an Asymmetric Capacitively Coupled Plasma Used for Plasma Polymerization
Author:
Affiliation:
1. Mawson Institute; University of South Australia; Mawson Lakes Adelaide SA 5095 Australia
2. Space Plasma; Power and Propulsion Laboratory, Research School of Physics and Engineering, The Australian National University; ACT 0200 Australia
Funder
Australian Research Council Discovery
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/ppap.201400026/fullpdf
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