Influence of Tetramethyldisiloxane-Oxygen Mixtures on the Physical Properties of Microwave PECVD Coatings and Subsequent Post-Plasma Reactions
Author:
Affiliation:
1. Ian Wark Research Institute; University of South Australia; Mawson Lakes Campus Mawson Lakes 5095 Australia
2. Mawson Institute; University of South Australia; Mawson Lakes Campus Mawson Lakes 5095 Australia
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/ppap.201400159/fullpdf
Reference48 articles.
1. Aging Process in Plasma-Polymerized Organosilicon Thin Films
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