Ion impingement effect on the structure and optical properties of Ti x Si 1− x O 2 films deposited by ICP‐PECVD
Author:
Affiliation:
1. College of Mechanical Engineering, Yangzhou University Yangzhou China
2. Institut des Matériaux Jean Rouxel (IMN), UMR CNRS 6502 Nantes France
Funder
National Natural Science Foundation of China
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/ppap.201900034
Reference41 articles.
1. Toward perfect antireflection coatings: numerical investigation
2. Low-loss dielectric mirror with ion-beam-sputtered TiO_2–SiO_2 mixed films
3. Design and plasma deposition of dispersion-corrected multiband rugate filters
4. Optical properties of SiO2–TiO2 thin film waveguides obtained by the sol–gel method and their applications for sensing purposes
5. Waveguide Raman spectroscopy of TiO2:SiO2 thin films
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