Deposition of Fluorocarbon Nanoclusters by Gas Aggregation Cluster Source-Reference-Cited by-同舟云学术

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Deposition of Fluorocarbon Nanoclusters by Gas Aggregation Cluster Source

Published:2012-02-14 Issue:4 Volume:9 Page:390-397
ISSN:1612-8850
Container-title:Plasma Processes and Polymers
language:en
Short-container-title:Plasma Processes Polym.

Author:

Drábik Martin,Serov Anton,Kylián Ondřej,Choukourov Andrei,Artemenko Anna,Kousal Jaroslav,Polonskyi Oleksandr,Biederman Hynek

Publisher

Wiley

Subject

Polymers and Plastics,Condensed Matter Physics

Reference67 articles.

1. Some characteristics of sputtered polytetrafluoroethylene films

2. Dielectric properties of fluorocarbon and chlorofluorocarbon films plasma polymerized in an R.F. glow discharge

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