A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD-Reference-Cited by-同舟云学术

A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD

Published:2018-03-08 Issue:5 Volume:15 Page:1700209
ISSN:1612-8850
Container-title:Plasma Processes and Polymers
language:en
Short-container-title:Plasma Process Polym

Author:

Gebhard Maximilian¹^ORCID,Mitschker Felix²,Hoppe Christian³,Aghaee Morteza⁴^ORCID,Rogalla Detlef⁵,Creatore Mariadriana⁴,Grundmeier Guido³,Awakowicz Peter²,Devi Anjana¹^ORCID

Affiliation:

1. Inorganic Materials Chemistry; Ruhr-University Bochum; Universitätsstr. 150 44801 Bochum Germany

2. Electrical Engineering and Plasma Technology; Ruhr-University Bochum; Universitätsstr. 150 44801 Bochum Germany

3. Technical and Macromolecular Chemistry; University of Paderborn; Warburgerstr. 100 33098 Paderborn Germany

4. Department of Applied Physics; Eindhoven University of Technology; P.O. Box 513 5600 MB Eindhoven The Netherlands

5. RUBION; Ruhr-University Bochum; Universitätsstr. 150 44801 Bochum Germany

Funder

DFG Collaborative Research Centre

Publisher

Wiley

Subject

Polymers and Plastics,Condensed Matter Physics

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/ppap.201700209/fullpdf

Reference52 articles.

1. Transparent barrier coatings on polyethylene terephthalate by single- and dual-frequency plasma-enhanced chemical vapor deposition

2. Thin-Film Permeation-Barrier Technology for Flexible Organic Light-Emitting Devices

3. Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers

4. Low temperature temporal and spatial atomic layer deposition of TiO2 films

5. Recent Advances in Gas Barrier Thin Films via Layer-by-Layer Assembly of Polymers and Platelets

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