On the Plasma Chemistry During Plasma Enhanced Chemical Vapor Deposition of Microcrystalline Silicon Oxides-Reference-Cited by-同舟云学术

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On the Plasma Chemistry During Plasma Enhanced Chemical Vapor Deposition of Microcrystalline Silicon Oxides

Published:2014-09-10 Issue:1 Volume:12 Page:82-91
ISSN:1612-8850
Container-title:Plasma Processes and Polymers
language:en
Short-container-title:Plasma Process. Polym.

Author:

Gabriel Onno¹,Kirner Simon¹,Klingsporn Max²,Friedrich Felice³,Stannowski Bernd¹,Schlatmann Rutger¹

Affiliation:

1. PVcomB/Helmholtz-Zentrum Berlin für Materialien und Energie GmbH; Schwarzschildstr. 3 12489 Berlin Germany

2. IHP, Im Technologiepark; 25, 15236 Frankfurt (Oder) Germany

3. PVcomB/TU Berlin, Semiconductor Devices; Sekr. E4 Einsteinufer 19 10587 Berlin Germany

Publisher

Wiley

Subject

Polymers and Plastics,Condensed Matter Physics

Reference35 articles.

1. Mixed-phase p-type silicon oxide containing silicon nanocrystals and its role in thin-film silicon solar cells

2. Microcrystalline silicon–oxygen alloys for application in silicon solar cells and modules

3. Anti-reflective microcrystalline silicon oxide p-layer for thin-film silicon solar cells on ZnO

4. Improvement of Rear Surface Passivation Quality in p-Type Silicon Heterojunction Solar Cells Using Boron-Doped Microcrystalline Silicon Oxide

5. Optimized amorphous silicon oxide buffer layers for silicon heterojunction solar cells with microcrystalline silicon oxide contact layers

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1. A method to slow down the etching of hydrogen plasma pretreatment and improve passivation in silicon heterojunction solar cells;Solar Energy Materials and Solar Cells;2024-12

2. Phosphorus doped hydrogenated silicon oxycarbide: Film formation, properties and its application on silicon heterojunction solar cell;Solar Energy Materials and Solar Cells;2024-10

3. Synergetic Effect of Gas Compositions on Material Properties of n‐Type Nanocrystalline Silicon Oxide Prepared by Plasma‐Enhanced Chemical Vapor Deposition;Solar RRL;2024-03-29

4. Development of n-Type, Passivating Nanocrystalline Silicon Oxide Films via Plasma-Enhanced Chemical Vapor Deposition;Solar;2024-03-11

5. Surface Cleaning and Passivation Technologies for the Fabrication of High-Efficiency Silicon Heterojunction Solar Cells;Materials;2023-04-16

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