Professor Riccardo d'Agostino (June 17, 1942-April 21, 2018) Founding Editor of Plasma Processes and Polymers-Reference-Cited by-同舟云学术

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Professor Riccardo d'Agostino (June 17, 1942-April 21, 2018) Founding Editor of Plasma Processes and Polymers

Published:2018-06 Issue:6 Volume:15 Page:1815061
ISSN:1612-8850
Container-title:Plasma Processes and Polymers
language:en
Short-container-title:Plasma Process Polym

Author:

Favia Pietro,Wertheimer Michael R.,Oehr Christian,Hegemann Dirk,Foerch Renate,Hagen Regina

Publisher

Wiley

Subject

Polymers and Plastics,Condensed Matter Physics

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/ppap.201815061/fullpdf

Reference8 articles.

1. Plasma etching of Si and SiO2in SF6–O2mixtures

2. The use of ?actinometer? gases in optical diagnostics of plasma etching mixtures: SF6-O2

3. Optical emission spectroscopy of reactive plasmas: A method for correlating emission intensities to reactive particle density

4. R d'Agostino F Cramarossa F Fracassi F Illuzzi Plasma Deposition, Treatment and Etching of Polymers 1990

5. 1990

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