A Detailed Investigation of Radicals and Ions in ECR Methane/Argon Microwave Discharge-Reference-Cited by-同舟云学术

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A Detailed Investigation of Radicals and Ions in ECR Methane/Argon Microwave Discharge

Published:2016-06-17 Issue:10 Volume:13 Page:970-980
ISSN:1612-8850
Container-title:Plasma Processes and Polymers
language:en
Short-container-title:Plasma Process. Polym.

Author:

Pokorný Petr¹,Mišina Martin¹,Novotný Michal¹,Fitl Přemysl¹,Vlček Jan¹,Musil Jindřich¹,Marešová Eva¹,Bulíř Jiří¹,Lančok Jan¹

Affiliation:

1. Institute of Physics v.v.i.; Academy of Sciences of the Czech Republic; Na Slovance 2 182 21 Prague 8 Czech Republic

Funder

Czech Science Foundation

Ministry of Education, Youth and Sports (MEYS)

Publisher

Wiley

Subject

Polymers and Plastics,Condensed Matter Physics

Reference34 articles.

1. Tribological study of hydrogenated amorphous carbon films with tailored microstructure and composition produced by bias-enhanced plasma chemical vapour deposition

2. Influence of the power on the processes controlling the formation of ECR-CVD carbon nitride films from CH4/Ar/N2plasmas

3. Methane Conversion in a N2CH4Radiofrequency Discharge

4. Mass-resolved retarding field energy analyzer and its measurement of ion energy distribution in helicon plasma

5. Bias-independent growth of carbon nanowalls by microwave electron-cyclotron resonance plasma CVD

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Mass spectrometry investigation of magnetron sputtering discharges;Vacuum;2017-09

2. Creation and behavior of radicals and ions in the Acetylene/Argon microwave ECR discharge;Plasma Processes and Polymers;2017-07-10

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