Affiliation:
1. Institute of Applied Beam Science, Graduate School of Science & Engineering; Ibaraki University; Japan
2. Department of Electrical Engineering; The Polytechnic University; Japan
Subject
Applied Mathematics,Electrical and Electronic Engineering,Computer Networks and Communications,General Physics and Astronomy,Signal Processing
Reference17 articles.
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2. The Institute of Electrostatics Japan Ed Handbook of electrostatics
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4. Ito T. Electrification and neutralization of wafers in nitrogen ambient using corona discharge ionizer;Mukaigawa;J Inst Electrostat Jpn,2008
5. Neutralization of wafer charging in nitrogen gas;Inaba;IEEE Trans Semicond Manuf,1992