Impact of high N2flow ratio on the chemical and morphological characteristics of sputtered N-DLC films

Author:

Leal G.1,Fraga M. A.2ORCID,Rasia L. A.3,Massi M.1

Affiliation:

1. Federal University of São Paulo-ICT; São José dos Campos SP Brazil

2. Associate Laboratory of Sensors and Materials; National Institute for Space Research; São José dos Campos SP Brazil

3. Regional University of the Northwest of State of Rio Grande do Sul; Ijuí RS Brazil

Funder

São Paulo Research Foundation-FAPESP

Brazilian Space Agency

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

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