1. Micro-Nano Systems Group Electronics Materials and Systems Department of Microtechnology and Nanoscience Chalmers University of Technology 412 58 Gothenburg Sweden
2. Department of Industrial and Materials Science Chalmers University of Technology Rännvägen 2A 412 96 Gothenburg Sweden
3. Department of Electrical Engineering Chalmers University of Technology Hörsalvägen 7 41296 Gothenburg Sweden
4. Enoaviatech AB 112 26 Stockholm Sweden
5. Smoltek AB Kaserntorget 7 411 18 Gothenburg DS Sweden