Model‐based process capability indices: The dry‐etching semiconductor case study
Author:
Affiliation:
1. Dipartimento di Economia Metodi Quantitativi e Strategie d'Impresa, Università di Milano‐Bicocca Milan Italy
2. Department of Statistical Sciences Università Cattolica del Sacro Cuore Milan Italy
Publisher
Wiley
Subject
Management Science and Operations Research,Safety, Risk, Reliability and Quality
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/qre.2698
Reference30 articles.
1. Process Capability Indices
2. A unified approach to capability indexes;Vännman K;Stat Sin,1995
3. A review of univariate and multivariate process capability indices
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