ChemInform Abstract: A Spin-on-Glass Film Treatment Technology Using a Fluoroalkoxysilane Vapor at Room Temperature.
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Published:2010-08-20
Issue:46
Volume:24
Page:no-no
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ISSN:0931-7597
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Container-title:ChemInform
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language:en
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Short-container-title:ChemInform
Author:
HOMMA T.,MURAO Y.