1. State Key Laboratory of Electronic Thin Film and Integrated Devices University of Electronic Science and Technology of China Chengdu 610054 China
2. College of Materials and Chemistry & Chemical Engineering Chengdu University of Technology Chengdu 610054 China
3. School of Materials and Energy University of Electronic Science and Technology of China Chengdu 610054 China
4. Institute of Microelectronics of Chinese Academy of Sciences Beijing 100029 China