IR Spectroscopy and Structure of RF Magnetron Sputtered a-SiC:H Films
Author:
Publisher
Wiley
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference53 articles.
1. and , Amorphous Semiconductor Technolgies & Devices, Vol. 6, Ed. Ohmsha, Tokyo 1983 (p. 182).
2. Handbook of Inorganic Chemistry, Si Suppl., Vol. B2, Springer-Verlag, Berlin 1984 (p. 275).
3. Chemical bonding states in the amorphous SixC1–x: H system studied by X-ray photoemission spectroscopy and infrared absorption spectra
4. Hydrogen content of amorphous silicon carbide prepared by reactive sputtering: Effects on films properties
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