Atom Probe Tomography on Semiconductor Devices
Author:
Affiliation:
1. School of Physics; The University of Sydney; NSW 2006 Australia
2. Australian Institute for Nanoscale Science and Technology, and School of Aerospace; Mechanical and Mechatronic Engineering; The University of Sydney; NSW 2006 Australia
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials
Reference196 articles.
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