1. Chongqing Key Laboratory of Micro‐Nano Systems and Smart Transduction Collaborative Innovation Center on Micro‐Nano Transduction and Intelligent Eco‐Internet of Things Chongqing Key Laboratory of Colleges and Universities on Micro‐Nano Systems Technology and Smart Transducing National Research Base of Intelligent Manufacturing Service Chongqing Technology and Business University Nan'an District Chongqing 400067 China
2. Department of Microsystems (IMS) Faculty of Technology Natural Sciences and Maritime Sciences University of South‐Eastern Norway Postboks 235 3603 Kongsberg Norway