High-Throughput Generation of Hierarchical Micro/Nanostructures by Spatial Vibration-Assisted Diamond Cutting

Author:

Zhu Zhiwei1,To Suet1,Zhang Shaojian1,Zhou Xiaoqin2

Affiliation:

1. Department of Industrial and Systems Engineering; State Key Laboratory of Ultra-Precision Machining Technology; The Hong Kong Polytechnic University; Kowloon 999077 Hong Kong SAR China

2. School of Mechanical Science and Engineering; Jilin University; Changchun 130022 JL China

Publisher

Wiley

Subject

Mechanical Engineering,Mechanics of Materials

Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Tool Offset Flycutting Multi-layer Hierarchical Microstructures;Fabrication of Micro/Nano Structures via Precision Machining;2023

2. Tool Offset Flycutting Straight-Groove-Type Microstructures;Fabrication of Micro/Nano Structures via Precision Machining;2023

3. Offset-tool-servo diamond end flycutting multi-layer hierarchical microstructures;International Journal of Mechanical Sciences;2022-11

4. Planar Motion Measurement of a Compliant Micro Stage: An Enhanced Microscopic Vision Approach;IEEE Transactions on Instrumentation and Measurement;2020-05

5. Advances in ultra-precision machining of micro-structured functional surfaces and their typical applications;International Journal of Machine Tools and Manufacture;2019-07

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