Interfacial Contact is Required for Metal-Assisted Plasma Etching of Silicon
Author:
Affiliation:
1. Department of Bioengineering; Imperial College London; London SW7 2AZ UK
Funder
Wellcome Trust
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/admi.201800836/fullpdf
Reference69 articles.
1. Silicon nanostructures for photonics and photovoltaics
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