Atomic Layer Deposition of Crystalline MoS2 Thin Films: New Molybdenum Precursor for Low-Temperature Film Growth-Reference-Cited by-同舟云学术

Atomic Layer Deposition of Crystalline MoS2 Thin Films: New Molybdenum Precursor for Low-Temperature Film Growth

Published:2017-03-30 Issue:18 Volume:4 Page:1700123
ISSN:2196-7350
Container-title:Advanced Materials Interfaces
language:en
Short-container-title:Adv. Mater. Interfaces

Author:

Mattinen Miika¹,Hatanpää Timo¹,Sarnet Tiina¹,Mizohata Kenichiro²,Meinander Kristoffer²,King Peter J.¹,Khriachtchev Leonid¹,Räisänen Jyrki²,Ritala Mikko¹,Leskelä Markku¹

Affiliation:

1. Department of Chemistry; University of Helsinki; P.O. Box 55 FI-00014 Finland

2. Department of Physics; University of Helsinki; P.O. Box 43 FI-00014 Finland

Funder

Finnish Centre of Excellence

Academy of Finland

Publisher

Wiley

Subject

Mechanical Engineering,Mechanics of Materials

Reference85 articles.

1. Atomically ThinMoS2: A New Direct-Gap Semiconductor

2. Electronic Structure and Optical Signatures of Semiconducting Transition Metal Dichalcogenide Nanosheets

3. The chemistry of two-dimensional layered transition metal dichalcogenide nanosheets

4. Atomically Thin MoS2: A Versatile Nongraphene 2D Material

5. Synthesis, Properties, and Applications of Transition Metal-Doped Layered Transition Metal Dichalcogenides

Cited by 108 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Large-scale growth of MoS2 hybrid layer by chemical vapor deposition with nanosheet promoter;Microelectronic Engineering;2024-10

2. Large-Area Epitaxial Growth of Transition Metal Dichalcogenides;Chemical Reviews;2024-08-12

3. Effect of vacuum atomic oxygen irradiation on tribological properties of MoS2/WC multilayer films;Ceramics International;2024-07

4. Structural Aspects of MoS_x Prepared by Atomic Layer Deposition for Hydrogen Evolution Reaction;ACS Catalysis;2024-06-20

5. Isolating the optical response of a MoS2 monolayer under extreme screening of a metal substrate;Physical Review B;2024-04-12