Atomic Layer Deposition to Materials for Gas Sensing Applications
Author:
Affiliation:
1. Laboratoire des Multimatériaux et Interfaces; UMR 5615; Université Claude Bernard Lyon 1/CNRS; 69622 Villeurbanne France
2. Institut für Chemie; Humboldt-Universität zu Berlin; Brook-Taylor-Str. 2 12489 Berlin Germany
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/admi.201600335/fullpdf
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