3D Volumetric Energy Deposition of Focused Helium Ion Beam Lithography: Visualization, Modeling, and Applications in Nanofabrication-Reference-Cited by-同舟云学术

3D Volumetric Energy Deposition of Focused Helium Ion Beam Lithography: Visualization, Modeling, and Applications in Nanofabrication

Published:2018-04-19 Issue:12 Volume:5 Page:1800203
ISSN:2196-7350
Container-title:Advanced Materials Interfaces
language:en
Short-container-title:Adv. Mater. Interfaces

Author:

Cai Jingxuan¹²³,Zhu Zhouyang¹²,Alkemade Paul F. A.⁴,van Veldhoven Emile⁵,Wang Qianjin⁶,Ge Haixiong⁶,Rodrigues Sean P.⁷,Cai Wenshan⁷^ORCID,Li Wen-Di¹²³

Affiliation:

1. Department of Mechanical Engineering; The University of Hong Kong; Pokfulam Hong Kong China

2. HKU-Shenzhen Institute of Research and Innovation (HKU-SIRI); Shenzhen Guangdong 518057 China

3. HKU-Zhejiang Institute of Research and Innovation (HKU-ZIRI); Hangzhou Zhejiang 311305 China

4. Kavli Institute of Nanoscience; Delft University of Technology; Delft 2628 CJ The Netherlands

5. TNO Science and Industry; Delft 2628 CK The Netherlands

6. College of Engineering and Applied Sciences; Nanjing University; Nanjing 210093 China

7. School of Electrical and Computer Engineering; Georgia Institute of Technology; Atlanta GA 30332 USA

Funder

Nederlandse Organisatie voor Wetenschappelijk Onderzoek

Research Grants Council, University Grants Committee

National Natural Science Foundation of China

Science and Technology Innovation Commission of Shenzhen Municipality

Science and Technology Department of Zhejiang Province

Publisher

Wiley

Subject

Mechanical Engineering,Mechanics of Materials

Reference61 articles.

1. Progress Toward Development of All-Printed RFID Tags: Materials, Processes, and Devices

2. Fabrication of photonic crystals for the visible spectrum by holographic lithography

3. Three-dimensional cavity nanoantenna coupled plasmonic nanodots for ultrahigh and uniform surface-enhanced Raman scattering over large area

4. Omnidirectional Printing of 3D Microvascular Networks

5. 3D Microperiodic Hydrogel Scaffolds for Robust Neuronal Cultures

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