1. Faculty of Natural Sciences and Technology; University of Applied Sciences and Arts, Hildesheim/Holzminden/Goettingen; Von-Ossietzky-Str. 99 37085 Göttingen Germany
2. Application Center for Plasma and Photonics APP; Fraunhofer Institute for Surface Engineering and Thin Films IST; Von-Ossietzky-Str. 100 37085 Göttingen Germany
3. Center for Tribological Coatings; Fraunhofer Institute for Surface Engineering and Thin Films IST; Bienroder Weg 54 E 38108 Braunschweig Germany
4. Technische Universität Braunschweig; Institute of Environmental and Sustainable Chemistry; Hagenring 30 38106 Braunschweig Germany
5. Technische Universität Braunschweig; Institute for Particle Technology; Volkmaroder Str. 5 38104 Braunschweig Germany