Silicon Particle Formation in Pyrolysis of Silane and Disilane
Author:
Publisher
Wiley
Subject
General Chemistry
Reference88 articles.
1. High chemical vapour deposition rates of epitaxial silicon layers
2. Gas-phase nucleation during the thermal decomposition of silane in hydrogen
3. Mechanisms of silicon monocrystalline growth from SiH4/H2 at reduced pressures
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