Patterning of soft polydimethylsiloxane elastomers using plasma etching
Author:
Publisher
Wiley
Subject
Materials Chemistry,Polymers and Plastics,Surfaces, Coatings and Films,General Chemistry
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/app.32760/fullpdf
Reference16 articles.
1. Dry etching of polydimethylsiloxane for microfluidic systems
2. Deep etching of biocompatible silicone rubber
3. The effect of fluorine-based plasma treatment on morphology and chemical surface composition of biocompatible silicone elastomer
4. Fluorine-Based Plasma Treatment of Biocompatible Silicone Elastomer: The Effect of Temperature on Etch Rate and Surface Properties
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