The implementation of low-power and wide tuning range MEMS filters for communication applications
Author:
Affiliation:
1. Electrical and Computer Engineering; George Washington University; Washington District of Columbia USA
2. Electrical and Electronic Engineering; Harran University; Şanliurfa Turkey
Funder
U.S. Army Research Laboratory, Adelphi, MD, USA
Publisher
American Geophysical Union (AGU)
Subject
Electrical and Electronic Engineering,General Earth and Planetary Sciences,Condensed Matter Physics
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/2015RS005893/fullpdf
Reference20 articles.
1. Abawi , A. T. 2016 The bending of bonded layers due to thermal stress http://hlsresearch.com/personnel/abawi/papers/bend.pdf
2. Samarao, and Farrokh Ayazi, “Postfabrication electrical trimming of silicon micromechanical resonators via Joule heating”;Ashwin;J. Microelectromech. Syst.,2011
3. High-Q HF microelectromechanical filters;Bannon;IEEE J. Solid-State Circuits,2000
4. Tuning in-plane fixed-fixed beam resonators with embedded heater in CMOS technology;Göktaş;IEEE Electron Device Lett.,2015
5. Göktaş , H. M. Zaghloul 2013 The novel microhotplate: A design featuring ultra high temperature, ultra low thermal stress, low power consumption and small response time
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1. Analysis and Simulation of Forcing the Limits of Thermal Sensing for Microbolometers in CMOS–MEMS Technology;Micromachines;2019-10-29
2. Towards an Ultra-Sensitive Temperature Sensor for Uncooled Infrared Sensing in CMOS–MEMS Technology;Micromachines;2019-02-06
3. Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters;Journal of Visualized Experiments;2018-02-04
4. Enhancement in CMOS-MEMS Resonator for High Sensitive Temperature Sensing;IEEE Sensors Journal;2017-02-01
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