The implementation of low-power and wide tuning range MEMS filters for communication applications

Author:

Göktaş H.12,Zaghloul M. E.1

Affiliation:

1. Electrical and Computer Engineering; George Washington University; Washington District of Columbia USA

2. Electrical and Electronic Engineering; Harran University; Şanliurfa Turkey

Funder

U.S. Army Research Laboratory, Adelphi, MD, USA

Publisher

American Geophysical Union (AGU)

Subject

Electrical and Electronic Engineering,General Earth and Planetary Sciences,Condensed Matter Physics

Reference20 articles.

1. Abawi , A. T. 2016 The bending of bonded layers due to thermal stress http://hlsresearch.com/personnel/abawi/papers/bend.pdf

2. Samarao, and Farrokh Ayazi, “Postfabrication electrical trimming of silicon micromechanical resonators via Joule heating”;Ashwin;J. Microelectromech. Syst.,2011

3. High-Q HF microelectromechanical filters;Bannon;IEEE J. Solid-State Circuits,2000

4. Tuning in-plane fixed-fixed beam resonators with embedded heater in CMOS technology;Göktaş;IEEE Electron Device Lett.,2015

5. Göktaş , H. M. Zaghloul 2013 The novel microhotplate: A design featuring ultra high temperature, ultra low thermal stress, low power consumption and small response time

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