Plasma‐Enhanced CVD Synthesis and Structural Characterization of Ta 2 N 3
Author:
Affiliation:
1. Max‐Planck‐Institut für Festkörperforschung Heisenbergstraße 1, 70569 Stuttgart, Germany, Fax: (internat.) + 49‐711‐689‐1091
2. Institut für Anorganische Chemie, Universität Stuttgart, Pfaffenwaldring 55, 70569 Stuttgart, Germany
Publisher
Wiley
Subject
Inorganic Chemistry
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/ejic.200400227
Reference38 articles.
1. An X-Ray Study of the Tantalum-Nitrogen System.
2. Die Nitride des Tantals
3. Preparation and crystal structure of β-Ta2N
4. A reinvestigation of the structure of ε-tantalum nitride
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