1. Institute of Biochemical Engineering; Technische Universität Braunschweig; Braunschweig 38106 Germany
2. Institute of Surface Technology; Technische Universität Braunschweig; Braunschweig Germany
3. Institute of Microtechnology; Technische Universität Braunschweig; Braunschweig Germany
4. Institut de Microelectrònica de Barcelona (IMB-CNM, CSIC); Barcelona Spain
5. Mechatronics Engineering Department; German Jordanian University; Mushaqar Jordan