Replica molding using polymeric materials: A practical step toward nanomanufacturing-Reference-Cited by-同舟云学术

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Replica molding using polymeric materials: A practical step toward nanomanufacturing

Published:1997-02 Issue:2 Volume:9 Page:147-149
ISSN:0935-9648
Container-title:Advanced Materials
language:en
Short-container-title:Adv. Mater.

Author:

Xia Younan,McClelland Jabez J.,Gupta Rajeev,Qin Dong,Zhao Xiao-Mei,Sohn Lydia L.,Celotta Robert J.,Whitesides George M.

Publisher

Wiley

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference22 articles.

1. For e-beam writing see Semiconductor Lithography: Principles and Materials, Plenum, New York 1988.

2. For X-ray lithography, see Solid State Technol. 1994, June, 49.

3. Absence of resolution degradation in X-ray lithography for λ from 4.5nm to 0.83nm

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