Etching Species Generation
Author:
Publisher
Wiley
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/9783527824199.ch9
Reference55 articles.
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3. Driving frequency effect on the electron energy distribution function in capacitive discharge under constant discharge power condition;Ahn S.K.;Appl. Phys. Lett.,2006
4. Inductively coupled pulsed plasmas in the presence of synchronous pulsed substrate bias for robust, reliable, and fine conductor etching;Banna S.;IEEE Trans. Plasma Sci.,2009
5. Pulsed high‐density plasmas for advanced dry etching processes;Banna S.;J. Vac. Sci. Technol., A,2012
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