Ion Beam Etching

Author:

Publisher

Wiley

Reference8 articles.

1. Controlling surface chemical states for selective patterning of CoFeB;Altieri N.D.;J. Vac. Sci. Technol., A,2019

2. Directional etch of magnetic and noble metals. I. Role of surface oxidation states;Chen J.K.C.;J. Vac. Sci. Technol., A,2017

3. Chemically assisted ion beam etching for submicron structures;Chinn J.D.;J. Vac. Sci. Technol., B,1983

4. Sputtering of metals in the presence of reactive gases;Hrbek J.;Thin Solid Films,1977

5. IBM Corporate Website(2016).Researchers celebrate 20th anniversary of IBM's invention of Spin Torque MRAM by demonstrating scalability for the next decade. A new mechanism is proposed for exciting the magnetic state of a ferromagnet. https://www.ibm.com/blogs/research/2016/07/ibm‐celebrates‐ 20‐years‐spin‐torque‐mram‐scaling‐ 11‐nanometers/ (accessed 4 September 2019).

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