1. Resonant.5G: technology innovation under the hood. Accessed 2 Jan 2022.www.resonant.com/resources/technical‐presentations.
2. Tutorial: Piezoelectric and magnetoelectric N/MEMS—Materials, devices, and applications;Will‐Cole A.R.;J. Appl. Phys.,2022
3. Materials, design, and characteristics of bulk acoustic wave resonator: a review;Liu Y.;Micromachines,2020
4. Piezoelectric micromachined ultrasound transducer (PMUT) arrays for integrated sensing, actuation and imaging;Qiu Y.;Sensors,2015