Characterization of group II hafnates and zirconates for metal-insulator-metal capacitors-Reference-Cited by-同舟云学术

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Characterization of group II hafnates and zirconates for metal-insulator-metal capacitors

Published:2010-09-17 Issue:2 Volume:248 Page:323-326
ISSN:0370-1972
Container-title:physica status solidi (b)
language:en
Short-container-title:phys. stat. sol. (b)

Author:

Lupina Grzegorz,Seifarth Olaf,Dudek Piotr,Kozlowski Grzegorz,Dabrowski Jarek,Thieme Hans-Jürgen,Lippert Gunther,Schroeder Thomas,Müssig Hans-Joachim

Funder

German Federal Ministry of Education and Research

Publisher

Wiley

Subject

Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/pssb.201046456/fullpdf

Reference27 articles.

1. Gate Dielectrics and MOS ULSIs

2. Memory Technologies for sub-40nm Node

3. 6F² buried wordline DRAM cell for 40nm and beyond

4. High-k dielectrics for future generation memory devices (Invited Paper)

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