Toward surface-friendly treatment of seeding layer and selected-area diamond growth
Author:
Publisher
Wiley
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/pssb.201000124/fullpdf
Reference11 articles.
1. Patterning of diamond microstructures on Si substrate by bulk and surface micromachining
2. Selective nucleation in silicon moulds for diamond MEMS fabrication
3. Selective deposition of diamond crystals by chemical vapor deposition using a tungsten‐filament method
4. Selected-area Deposition of Diamond Films on Silicon Nitride-coated Silicon Substrates Using Negatively Biased Microwave Plasma Enhanced Chemical Vapor Deposition Technique
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