1. Research Center of Nanophotonics and MetamaterialsITMO University Kronverksky pr., 49 St. Petersburg 197101 Russia
2. The Laboratory of Superconducting Metamaterials and Department of Theoretical Physics and Quantum TechnologiesNational University of Science and Technology “MISiS” Leninsky pr. 4 Moscow 119049 Russia
3. Scientific and Technological Center of Unique Instrumentation RAS (STC UI RAS) Butlerova str., 15 Moscow 117342 Russia