Topology optimization for optical microlithography with partially coherent illumination-Reference-Cited by-同舟云学术

Topology optimization for optical microlithography with partially coherent illumination

Published:2016-06-16 Issue:5 Volume:109 Page:631-647
ISSN:0029-5981
Container-title:International Journal for Numerical Methods in Engineering
language:en
Short-container-title:Int. J. Numer. Meth. Engng

Author:

Zhou Mingdong¹,Lazarov Boyan S.¹,Sigmund Ole¹

Affiliation:

1. Section of Solid Mechanics, Department of Mechanical Engineering; Technical University of Denmark; Nils Koppels Allé Building 404 Kgs. Lyngby DK-2800 Denmark

Funder

Danmarks Tekniske Universitet

EU research project ‘LaScISO’

Villum Fonden

Det Frie Forskningsråd

Publisher

Wiley

Subject

Applied Mathematics,General Engineering,Numerical Analysis

Reference45 articles.

1. On the similarities between micro/nano lithography and topology optimization projection methods;Jansen;Structural and Multidisciplinary Optimization,2013

2. Topology optimization for optical projection lithography with manufacturing uncertainties;Zhou;Applied Optics,2014

3. Resolution Enhancement Techniques in Optical Lithography

4. Flexible and efficient approach to E-beam proximity effect correction-PYRAMID. Surface and Interface Analysis;Lee;Proc. of NIST workshop on Modeling Electron Transport for Applications in Electron and X-Ray Analysis and Metrology,2005

5. Proximity correction algorithms and a co-processor based on regularized optimization. I: Description of the algorithm;Peckerar;Journal of Vacuum Science and Technology B,1995

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fail-safe stress-constrained manufacturing error tolerant topology optimization;Computer Methods in Applied Mechanics and Engineering;2024-03

2. Photonic topology optimization with semiconductor-foundry design-rule constraints;Optics Express;2021-07-13

3. Design of compliant mechanisms using continuum topology optimization: A review;Mechanism and Machine Theory;2020-01

4. A novel approach of reliability-based topology optimization for continuum structures under interval uncertainties;Rapid Prototyping Journal;2019-10-14

5. Topology optimization of compliant mechanisms with stress constraints and manufacturing error robustness;Computer Methods in Applied Mechanics and Engineering;2019-09