Epitaxial Growth of Magnetron‐Sputtered ZrB <sub>2</sub> Films on Si(100) Substrates-Reference-Cited by-同舟云学术

Epitaxial Growth of Magnetron‐Sputtered ZrB ₂ Films on Si(100) Substrates

Published:2022-08-23 Issue:21 Volume:219 Page:2200330
ISSN:1862-6300
Container-title:physica status solidi (a)
language:en
Short-container-title:Physica Status Solidi (a)

Author:

Schnitter Claudia¹,Rosen Johanna¹^ORCID,Högberg Hans¹^ORCID

Affiliation:

1. Department of Physics, Chemistry and Biology (IFM) Linköping University SE-581 83 Linköping Sweden

Funder

Knut och Alice Wallenbergs Stiftelse

Stiftelsen Åforsk

International Interdisciplinary Laboratory for Advanced Functional Materials, Linköpings Universitet

Vetenskapsrådet

Stiftelsen för Strategisk Forskning

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/pssa.202200330

Reference29 articles.

1. C. W.Nelson inProc. Int. Symp. Hybrid Microelectron. Sept. 29-October 1 1969 Dallas Texas International Society of Hybrid Microelectronics Montgomery U.S.A. Dallas 1969 pp.413–432.

2. Diffusion barriers in thin films

3. Synthesis and properties of some refractory transition metal diboride thin films

4. Deposition of zirconium boride thin films by direct current triode sputtering

5. Diboride diffusion barriers in silicon and GaAs technology

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