Affiliation:
1. Department of Technology of nanostructures and devices Institute for Physics of Microstructures of the Russian Academy of Sciences Afonino Nizhny Novgorod Region 603087 Russia
2. Plasma Technologies Department Institute of Applied Physics of the Russian Academy of Sciences Nizhny Novgorod 603950 Russia
Abstract
Multilayer films of diamond‐like carbon (DLC) on monocrystalline diamond substrates have been for the first time obtained by plasma‐chemical deposition. Their chemical composition and structural and morphological properties are studied. The DLC individual layers differ in their sp3 carbon content. The multilayer nature of the resulting coatings is confirmed by periodic density modulation on the small‐angle X‐ray reflectometry curve and modulations in the CsC8, CsC6, CsC4 lines on the crater depth profile of secondary ions of elements (secondary ion mass spectrometry). The dependence of the deposition rate of multilayer DLC films on diamond, their composition and properties on the argon additive to the reaction gas mixture, as well as on methane flow, pressure and growth time, are studied.
Funder
Russian Science Foundation