Affiliation:
1. Institut für Physik und Institut für Mikro‐ und Nanotechnologien TU Ilmenau 98693 Ilmenau Germany
2. CiS Forschungsinstitut für Mikrosensorik GmbH Konrad‐Zuse‐Str. 14 99099 Erfurt Germany
Abstract
The impact of light‐induced degradation (LID) treatments is investigated using low‐temperature photoluminescence in Si:In. A feature called as the P‐line, located at 1.118 eV, provides information on the decisive energy barrier for the LID effect. The intensity of the P‐line can be reproducibly influenced by illumination and annealing treatments. The decay of the P‐line after quenching, illumination, and moderate annealing of the silicon samples is measured as function of time and annealing temperature. Both indium‐doped as‐grown Czochralski and indium implanted float‐zone silicon wafers are examined and their behavior is compared. Based on these measurements, an energy barrier for the P‐line defect transition is calculated. The LID defect model is used to discuss the results.
Funder
Deutsche Forschungsgemeinschaft