Affiliation:
1. Leibniz Institute of Surface Engineering (IOM) 04318 Leipzig Germany
2. cfaed Center for Advancing Electronics Dresden TU Dresden Helmholtzstr. 18 01062 Dresden Germany
Abstract
The fabrication of plasmonic 3D microstructures is still a challenge. In this study, the fabrication of gold‐nanoparticle (Au‐NP)‐filled acrylate‐based micron‐scale cuboids forming plasmonic 3D particles is investigated. UV curable acrylate is mixed with HAuCl4 and spin‐coated onto a fused silica wafer. UV light and heat treatment of the layer result in polymerization of the acrylate and formation of Au‐NPs with a plasmonic resonance ranging from 535 to 550 nm. The plasmonic resonance wavelength decreases slightly with increasing UV dose. The resonance wavelength can be shifted by a subsequent annealing process. The decreasing resonance wavelength with increasing annealing temperature is discussed as a result of the increasing Au‐NPs. The size and the distribution of the resulting gold particles in the acrylate matrix is investigated by transmission electron microscopy. The Au‐NPs‐filled acrylate layer is laser structured using a UV‐femtosecond laser, which allows the fabrication of adjustable micro‐cuboids with edge lengths down to 15 μm. The laser‐cut micro‐cuboids are transferred into isopropanol and the plasmonic properties of the structures in the liquid are successfully demonstrated. The presented concept allows easy and large‐scale fabrication of plasmonic microstructures with independently adjustable plasmonic properties and microstructural size and shape.
Subject
Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials