P-9: High Performance Back Channel Etch Metal Oxide Thin-film Transistor with Double Active Layers

Author:

Yang Jong-Heon12,Choi Ji Hun1,Pi Jae-Eun1,Kim Hee-Ok1,Park Eun-Suk1,Kwon Oh-Sang1,Nam Sooji1,Cho Sung Haeng1,Yoo Seunghyup2,Hwang Chi-Sun1

Affiliation:

1. 'Electronics and Telecommunications Research Institute, Korea

2. Dept. of Electrical Engineering, Korea Advanced Institute of Science and Technology, Korea

Publisher

Wiley

Reference7 articles.

1. Present status of amorphous In-Ga-Zn-O thin-film transistors;Kamiya;Sci. Technol. Adv. Mater.,2010

2. High Mobility and Highly Stable Aluminum-doped Indium Zinc Tin Oxide Thin-Film Transistors;Cho;SID,2014

3. Back Channel Etch Oxide TFT on Plastic Substrate for the Application of High Resolution TFT- LCD;S.-H. K.P.;AMFPD,2014

4. High Performance Oxide Thin Film Transistors with Double Active Layers;Kim;IEDM,2008

5. Improvement in both mobility and bias stability of ZnSnO transistors by inserting ultra-thin InSnO layer at the gate insulator/channel interface;Kim;Applied Physics Letters,2011

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