Monte Carlo simulation of secondary electron images for real sample structures in scanning electron microscopy
Author:
Affiliation:
1. Hefei National Laboratory for Physical Sciences at Microscale and Department of Physics; University of Science and Technology of China; Hefei, Anhui People's Republic of China
Funder
National Natural Science Foundation of China
“973” project
“111” project
Publisher
Wiley
Subject
Instrumentation,Atomic and Molecular Physics, and Optics
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/sca.20288/fullpdf
Reference34 articles.
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