1. Institute of New Energy Technology Ningbo Institute of Materials Technology and Engineering Chinese Academy of Sciences (CAS) Ningbo City 315201 P. R. China
2. College of Materials Science and Opto-Electronic Technology University of Chinese Academy of Sciences Beijing City 100049 P. R. China
3. IEK5-Photovoltaics Forschungszentrum Jülich 52425 Jülich Germany
4. Suzhou Tuosheng Intelligent Equipment Co., Ltd Suzhou City Jiangsu Province 215156 P. R. China