1. Key Laboratory of Bionic Engineering Ministry of Education Jilin University Changchun 130022 P. R. China
2. The State Key Laboratory of High Performance and Complex Manufacturing College of Mechanical and Electrical Engineering Central South University Changsha 410012 P. R. China
3. Key Laboratory for Precision and Non‐Traditional Machining Technology of Ministry of Education Dalian University of Technology Dalian 116024 P. R. China
4. Biomedical Microelectromechanical Systems Laboratory Department of Mechanical Engineering Columbia University New York NY 10027 USA