1. Key Laboratory of Bionic Engineering Ministry of Education Jilin University Changchun 130022 China
2. The State Key Laboratory of High Performance and Complex Manufacturing College of Mechanical and Electrical Engineering Central South University Changsha 410012 China
3. Aerospace System Engineering Shanghai Shanghai 201109 China
4. Biomedical Microelectromechanical Systems Laboratory Department of Mechanical Engineering Columbia University New York NY 10027 USA