Actively Tunable Spectral Filter for Compact Hyperspectral Camera Using Angle‐Sensitive Plasmonic Structures

Abstract

AbstractHyperspectral imaging provides enhanced classification and identification of veiled features for diverse biomedical applications such as label‐free cancer detection or non‐invasive vascular disease diagnostics. However, hyperspectral cameras still have technical limitations in miniaturization due to the inherently complex and bulky configurations of conventional tunable filters. Herein, a compact hyperspectral camera using an active plasmonic tunable filter (APTF) with electrothermally driven spectral modulation for feature‐augmented imaging is reported. APTF consists of angle‐sensitive plasmonic structures (APS) over an electrothermal MEMS (Microelectromechanical systems) actuator, fabricated by combining nanoimprint lithography, and MEMS fabrication ona 6‐inch wafer. APS have a complementary configuration of Au nanohole and nanodisk arrays supported on asilicon nitride membrane. APTF shows a large angular motion at operational voltages of 5–9 VDC for continuous spectral modulation between 820 and 1000 nm (45 nm/V). The compact hyperspectral camera was fully packaged with a linear polarizer, APTF and amonochromatic camera, exhibiting asize of 16 mm (ϕ) × 9.5 mm (h). Feature‐augmented images of subcutaneous vein and a fresh fruit have been successfully demonstrated after the hyperspectral reconstruction and spectral feature extraction. This functional camera provides a new compact platform for point‐of‐care or in vivo hyperspectral imaging in biomedical applications.