Affiliation:
1. Department of Materials Science and Chemical Engineering Hanyang University Ansan 15588 Republic of Korea
2. BK21 FOUR ERICA‐ACE Center Hanyang University Ansan 15588 Republic of Korea
3. Department of Materials Engineering and Convergence Technology Gyeongsang National University Jinju 52828 Republic of Korea
Abstract
AbstractHerein, a piezovoltage‐modulated field‐effect transistor (PVMFET) is proposed that provides physical sensing capabilities while maintaining excellent FET performance through the combination of a piezovoltage (PV) capacitor sensing medium and an FET structure that can amplify signal responses to external stimuli. The PV generated in the piezoelectric poly(vinylidene fluoride)‐co‐trifluoroethylene‐based PV capacitor through bending deformation modulates the effective gate voltage induced in the PV‐modulated gate. In particular, in the device, it is found that the piezo‐responsive modulation of the effective gate electric field is enhanced by the applied gate voltage, corresponding to the higher modulation of channel current at the higher gate voltage under bending. Accordingly, a PVMFET‐based physical sensor that can accurately estimate the bending angle is implemented. The sensor exhibits a high sensitivity, repeatability, and a sensing linearity of 0.98 while the bending angle is varied from 0° to 93°. The sensing performance remains constant even when the bending frequency changed from 0.25 to 1.0 Hz at the largest bending angle (93°) measured, confirming the effectiveness of the sensor platform. The proposed PVMFET‐based physical sensor platform is suitable for applications that require stable driving performance and the simultaneous detection of external physical stimuli in real time.
Funder
National Research Foundation of Korea
Korea Institute for Advancement of Technology
Ministry of Science and ICT, South Korea
Subject
Industrial and Manufacturing Engineering,Mechanics of Materials,General Materials Science
Cited by
1 articles.
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