Fast Flexible Bottom‐Gated Hydrogen Sensor Based on Silicon Nanomembrane
Author:
Affiliation:
1. Department of Mechanical Engineering Korea Advanced Institute of Science and Technology (KAIST) Daejeon 34141 Republic of Korea
2. School of Electrical and Computer Engineering Georgia Institute of Technology Atlanta GA 30332 USA
Funder
National Research Foundation of Korea
Publisher
Wiley
Subject
Industrial and Manufacturing Engineering,Mechanics of Materials,General Materials Science
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/admt.202000847
Reference36 articles.
1. All-optical hydrogen sensor based on a high alloy content palladium thin film
2. Highly sensitive optical hydrogen sensor using circular Pd-coated singlemode tapered fibre
3. Optical hydrogen sensor based on etched fiber Bragg grating sputtered with Pd/Ag composite film
4. Silicon-on-Insulator (SOI) Ring Resonator-Based Integrated Optical Hydrogen Sensor
5. Low-Cost Hydrogen Sensor in the ppm Range with Purely Optical Readout
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