On‐Chip THz Helical Antenna Based on Metal Self‐Rolled‐up Membrane Nanotechnology-Reference-Cited by-同舟云学术

On‐Chip THz Helical Antenna Based on Metal Self‐Rolled‐up Membrane Nanotechnology

Published:2024-06-17 Issue: Volume: Page:
ISSN:2365-709X
Container-title:Advanced Materials Technologies
language:en
Short-container-title:Adv Materials Technologies

Author:

Li Longyu¹²^ORCID,He Wei²³⁴,Zhou Zhikun¹²,Yuan Tao⁵,Sang Lei¹²,Mei Yongfeng⁶,Chen Xiaochen³⁴,Huang Wen¹²^ORCID

Affiliation:

1. Yangtze Delta Region Institute (Huzhou) University of Electronic Science and Technology of China Huzhou 313001 China

2. School of Microelectronics Hefei University of Technology Hefei 230601 China

3. China Academy of Information and Communications Technology Beijing 100191 China

4. Shenzhen Academy of Information and Communications Technology Shenzhen 518048 China

5. College of Electronics and Information Engineering Shenzhen University Shenzhen 518060 China

6. Department of Materials Science State Key Laboratory of ASIC and Systems Fudan University Handan Road Shanghai 200433 China

Abstract

AbstractThis paper demonstrates the on‐chip terahertz (THz) helical antenna based on metal self‐rolled‐up membrane (M‐SRuM) nanotechnology, which utilizes the residual stress in multilayer metal membrane deposited by electron beam (E‐beam) evaporation to provide the rolling force and to form the radiation body of the helical antenna. Precise design method is proposed based on multi‐physics modeling for mechanical and electrical analysis, and the two operating modes of on‐chip helical antenna are modeled and analyzed. The test results show that the normal mode of self‐rolled‐up THz helical antenna is able to operate at frequency as high as 0.223 THz with the corresponding impedance bandwidth of 13 GHz.

Funder

National Key Research and Development Program of China

National Natural Science Foundation of China

Publisher

Wiley

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/admt.202400503

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