Affiliation:
1. Shanghai Key Laboratory of Multidimensional Information Processing East China Normal University Shanghai 200241 China
2. SEU‐FEI Nano‐Pico Center Key Laboratory of MEMS of Ministry of Education Collaborative Innovation Center for Micro/Nano Fabrication Device and System Southeast University Nanjing 210096 P. R. China
Funder
Science and Technology Commission of Shanghai Municipality
National Natural Science Foundation of China
Shanghai Education Development Foundation
Shanghai Municipal Education Commission
Fundamental Research Funds for the Central Universities
Subject
Industrial and Manufacturing Engineering,Mechanics of Materials,General Materials Science
Cited by
12 articles.
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